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Absolute sputtering yields from solid Ne by low energy He+ and Arq+ (1 ≤ q ≤ 6) impact
https://rikkyo.repo.nii.ac.jp/records/10714
https://rikkyo.repo.nii.ac.jp/records/1071473dce46e-00d2-42b1-872a-74bca93a9a21
名前 / ファイル | ライセンス | アクション |
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JPCS_163_1.pdf (460.3 kB)
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Item type | 学術雑誌論文 / Journal Article(1) | |||||
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公開日 | 2015-01-13 | |||||
タイトル | ||||||
タイトル | Absolute sputtering yields from solid Ne by low energy He+ and Arq+ (1 ≤ q ≤ 6) impact | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Absolute sputtering yields from solid Ne by low energy He+ and Arq+ (1 ≤ q ≤ 6) impact | |||||
言語 | ||||||
言語 | eng | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | journal article | |||||
著者 |
Fujita, Shinya
× Fujita, Shinya× Tachibana, Takayuki× Koizumi, Tetsuo× Hirayama, Takato |
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抄録 | ||||||
内容記述タイプ | Abstract | |||||
内容記述 | Absolute sputtering yields from the surface of solid Ne by low energy He+ and Arq+ (1 ≥ q ≥ 6) impact are measured. Very large sputtering yields (300 atoms/ion for 1 keV He+ impact, and 3000 atoms/ion for 1keV Ar+ impact) have been observed. A significant dependence of the sputtering yields on the chage state, i.e. the potential energy, of the incident ion for Arq+ has not been observed because it is estimated to be much smaller than that of the kinetic sputtering, which suggests that the mechanism of potential sputtering is similar to those known for the electron- and photon-stimulated desorption processes. | |||||
書誌情報 |
Journal of Physics Conference Series en : Journal of Physics Conference Series 巻 163, 号 1, p. 012083, 発行日 2009 |
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出版者 | ||||||
出版者 | IOP Publishing | |||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 1742-6588 | |||||
DOI | ||||||
関連タイプ | isIdenticalTo | |||||
識別子タイプ | DOI | |||||
関連識別子 | info:doi/10.1088/1742-6596/163/1/012083 | |||||
権利 | ||||||
権利情報 | © IOP Publishing 2009 | |||||
著者版フラグ | ||||||
出版タイプ | VoR | |||||
出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 |